磷酸处理对多孔SiO2薄膜质子导电特性和双电层 薄膜晶体管性能的影响
万相12, 刘阳辉1, 张洪亮1

Effects of H3PO4 Treated Porous SiO2 on Proton Conductivity and Performances of EDL-TFTs
WAN Xiang12, LIU Yang-Hui1, ZHANG Hong-Liang1
图1 EDLC-TFTs的器件结构示意图a及SiO 2 薄膜截面的扫描电镜b和透射电镜c照片
Fig. 1 Schematic diagram of vertical EDL-TFTs a and cross-sectional SEM image b and TEM image c of the as-deposited SiO 2